Method of making micro-pixelated fluid-assay structure

ABSTRACT

A method for producing an active-matrix, fluid-assay micro-structure including, utilizing low-temperature TFT and Si technology, establishing preferably on a glass or plastic substrate a matrix array of digitally-addressable, assay-material-specific-functionalizable pixels, and employing pixel-specific digital addressing for selected, array-established pixels, individually functionalizing these pixels.

CROSS REFERENCE TO RELATED APPLICATION

This application claims filing-date priority to currently co-pendingU.S. Provisional Patent Application Ser. No. 60/849,875, filed Oct. 6,2006, for “Micro-Pixelated Array Assay Structure and Methodology”. Theentire disclosure content of that prior-filed provisional case is herebyincorporated herein by reference.

BACKGROUND AND SUMMARY OF THE INVENTION

This invention relates to a method for producing a pixelated,thin-film-based, fluid-assay, active-matrix structure. Moreparticularly, it pertains to a method for producing a row-and-columnmicro-structure array of active, remotely individuallydigitally-addressable pixels which have been prepared on a supportingsubstrate, each with (a) an included assay sensor (at least one)possessing an assay site (at least one), and (b) an also includeddigitally-addressable, electromagnetic field-creating structure. Thisfield-creating structure is energizable to bathe the associated pixelwith an ambient electromagnetic field which is one or more of a field oflight, a field of heat, and a non-uniform electrical field. On apixel-by-pixel basis, in accordance with preferred and best modepractice of the invention, and utilizing digital-computer-implemented,pixel-specific digital addressing, the pixels' respective assay sitesare functionalized to possess respective assay-material-specificity soas each to have a defined, specific affinity for at least one kind of afluid-assay material.

Preferably, the invention takes the form of a method for creating arelatively inexpensive, consumer-level-affordable, thin-film-based.assay structure which features a low-cost substrate that will readilyaccommodate low-cost, and preferably “low-temperature-condition”,fabrication thereon of substrate-supported matrix-pixel “components”:“Low temperature” is defined herein as a being a characteristic ofprocessing that can be done on substrate material having a transitiontemperature (Tg) which is less than about 850° C., i.e., less than atemperature which, if maintained during sustained material processing,would cause the subject material to lose dimensional stability.Accordingly, while the matrix-pixel technology which is involved withpractice of the methodology of this invention, if so desired, can beimplemented on more costly supporting silicon substrates, the preferredsupporting substrate material employed in the practice of the inventionis one made of lower-expense glass or plastic materials. The terms“glass” and “plastic” employed herein to describe a preferred substratematerial should be understood to be referring also to other suitable“low-temperature materials. Such substrate materials, while importantlycontributing on one level to relatively low, overall, end-product cost,also allow specially for the compatible employment, with respect to thefabrication of supported pixel structure, of processes and methods thatare based on amorphous, micro-crystal and polysiliconthin-film-transistor (TFT) technology. In particular, these substratematerials uniquely accommodate the use of the just-mentioned,low-temperature TFT technology in such a way that electrical, mechanicaland electromagnetic field-creating devices—devices that are includedvariously in the structure produced by the invention—can be fabricatedsimultaneously in a process flow which is consistent with thetemperature tolerance of such substrate materials.

Regarding the preference herein for the use of low-temperature TFTtechnology, and briefly describing aspects of that technology,low-temperature TFT devices are formed through deposition processes thatdeposit silicon-based (or other-material-based, as mentioned belowherein, and as referred to at certain points within this text with theexpression “etc.”) thin film semiconductor material (which, for certainapplications, may, of course, later be laser crystallized). This isquite different from classic silicon CMOS device technology thatutilizes a single-crystal silicon wafer bulk material as itssemiconductor material. While the resulting TFT devices may not have theswitching speed and drive capability of transistors formed onsingle-crystal substrates, TFT transistors can be fabricated cheaplywith a relatively few number of process steps. Further, thin-filmdeposition processes permit TFT devices to be formed on alternatesubstrate materials, such as transparent glass substrates, for use, asan example, in liquid crystal displays. In this context, it will beunderstood that low-temperature TFT device fabrication may variouslyinvolve the use typically of amorphous Si (a-Si), of micro-crystallineSi, and or of polycrystalline Si formed by low-temperature internalcrystalline-structure processing of amorphous Si. Such processing isdescribed in U.S. Pat. No. 7,125,451 B2, the contents of which patentare hereby incorporated herein by reference.

Further in accordance with preferred and best mode, preferably “siliconon glass or plastic” practice features of the invention, pixelfunctionalization may be performed under circumstances wherein it isaided by the presence and use, in each pixel, of the includedpixel-bathing electromagnetic field-creating structure which is, when soused, remotely and controllably energized under the management of anappropriate digital computer, to bathe the pixel-associated assay sensorand its possessed assay site(s) with such a field (light, heat and/ornon-uniform electrical).

Beyond the specific practice of the present invention, this samefield-creating structure has later utility, where appropriate, inrelation to participating selectively in the reading-out of ultimatelyachieved, completed-assay results. More will be said about thisinvention-enabled later utility shortly.

Digitally addressed, pixel-by-pixel functionalization allows for theproduction of highly specialized and individualized fluid-materialassays. Such functionalization, performed in the context of alsoemploying, as an aid, the mentioned electromagnetic field-creatingstructure, enables a very high, selective versatility to be associatedwith finally functionalized pixels. Additionally, and as will be morefully explained later herein, this same, per-pixel,digitally-addressable electromagnetic field-creating structure opens thedoor to permitting a number of highly specialized assay-result outputreading practices.

The present invention, utilizing the above-mentioned low-temperature TFTand “Si on glass or plastic substrate” technology, thus takes the formof a method for creating an extremely versatile and relatively low-costdigitally-addressable assay structure, also referred to hereininterchangeably as a micro-structure. As will become apparent from theinvention description which is provided herein, the structure created bythe methodology of this invention is one which is providable, as asingularity, to a user, in a status which enables that user to performone, or even plural different (as will be explained), type(s) offluid-material assay(s). It is also a structure which enables the usefulreading out of completed assay results completely on a precision,pixel-by-pixel basis.

As will be seen, the methodology which is contributed to the state ofthe relevant sensor assay art by the present invention is a veryhigh-level methodology. In this context, it consists of a unique,high-level organization of steps which are cooperatively linked toproduce a unique fluid-assay structure. Detailed features of the severalhigh-level steps involved in the practice of this invention are, or maybe, drawn from well-known and conventional practices aimed at producingvarious micro-structure devices and features, such as semiconductormatrices, or arrays. The invention does not reside in, or include, anyof these feature details. Rather, it resides in the overall arrangementof steps that are capable of leading to the fabrication of the desired,end-result assay micro-structure mentioned above.

With respect to the concept of assay-site functionalization, except forthe special features enabled by practice of the present invention thatrelate (a) to “pixel-specific” functionalization, and (b) possiblefunctionalization under the influence of an assay-site-bathing, ambientelectromagnetic field of a selected nature, assay-site functionalizationis in all other respects essentially conventional in practice. Suchfunctionalization is, therefore, insofar as its conventional aspects areconcerned, well known to those generally skilled in the relevant art,and not elaborated herein, but for a brief mention later herein notingthe probable collaborative use, in many functionalization procedures, ofconventional flow-cell assay-sensor-functional processes.

While ultimately-enabled functionalization specificity for a particularselected assay site (resident within a given pixel), in accordance withpractice of the present invention in certain instances, is generally andlargely controlled by ambient “bathing” of that site withselected-nature electromagnetic-field energy received from theearlier-mentioned, and of course appropriately positionedelectromagnetic field-creating structure, it turns out that“site-precision” functionalization-bathing specificity is not a criticaloperational factor. In other words, it is entirely appropriate if theentirety of a pixel is field-bathed, and thereby becomes ultimately“overall functionalized”. Accordingly, terminology referring to pixelfunctionalization and to assay-site functionalization is used hereininterchangeably.

While there are many ways in which the core characteristics of thismethodologic invention may be visualized and understood, one good way toaccomplish this is to focus attention upon the important characteristicsof the intended, end-result product of the proposedassay-structure-producing methodology. Accordingly, we lead into thedescription of this methodologic invention through a description of thatend-result product, with reference made to severalembodiments/modifications of such a product. The methodologic steps ofthe invention are set forth following this product discussion.

One of the first important things to note about the subject end-resultproduct is that it takes the form of a micro-structure pixelated array,or matrix, of active pixels which are designed to be individually, i.e.,pixel-specifically, addressed and accessed, for at least two importantpurposes, by a digital computer. The first of these purposes is toenable selective functionalization of assay sites in pixels to becomeresponsive to particular fluid-assay materials. The second involvesenabling user-selectable access to functionalized pixels to obtainoutput readings of responses generated by those pixels regarding theresult(s) of a performed fluid-material assay. In this context, thestructure generally created by the methodology of this invention allowsfor selective characterization of an entire matrix array, or even simplyportions of such an array, for the performance of a specific, or pluralspecific (different or same), user-chosen fluid-material assay(s).

A full description of the preferred and best mode methodology of theinvention herein will follow (a) a completion of this introductory text,(b) the then-presented Description of the Drawings, and (c) thethereafter-presented, detailed, end-result product description.

Before continuing, however, certain definitions relating to terminologyemployed herein are set forth.

The term “active-matrix” as used herein refers to a pixelated structurewherein each pixel is controlled by and in relation to some form ofdigitally-addressable electronic structure, which structure includesdigitally-addressable electronic switching structure, defined by one ormore electronic switching device(s), operatively associated, as will beseen, with also-included pixel-specific assay-sensor structure andpixel-bathing electromagnetic field-creating structure—all formedpreferably by low-temperature TFT and Si technology as mentioned above.

The term “bi-alternate” refers to a possible, selectable matrixcondition enabled by practice of the present invention, wherein everyother pixel in each row and column of pixels is selectively commonlyfunctionalized for one, specific type of fluid-material assay. Thiscondition effectively creates, across the entire area of an overallmatrix made by practice of the invention, two differently and/orseparately functionalized, lower-pixel-count submatrices of pixels (whatcan be thought of as a two-assay, single-overall-matrix condition).

The term “tri-alternate” refers to a similar condition, but one whereinevery third pixel in each row and column is selectively commonlyfunctionalized for one, specific type of a fluid-material assay. Thiscondition effectively creates, across the entire area of an overallmatrix, three, differently and/or separately functionalized,lower-pixel-count submatrices of pixels (what can be thought of as athree-assay, single-overall-matrix condition).

Individual digital addressability of each pixel permits these and otherkinds of lower-pixel-count, submatrix functionalization options, ifdesired.

Other kinds of submatrices are, of course, possible, and one other typeof submatrix arrangement is specifically mentioned hereinbelow.

Whenever the present invention is practiced to create a submatrixfunctionalization of an overall matrix, that approach, depending uponfunctionalization “strategy”, enables either (a) several, successivesame-assay-material matrix-assay uses to take place with the sameoverall matrix, or (b) several successive different-assay-materialsubmatrix-assay uses to occur, also employing the same overall matrix.

It should be apparent also that the implementation, in the practice ofthe invention, of different submatrix-functionalization pixeldistributions with respect to one-only, or to different, matrixstructure(s) can enable a end user to perform selected assays with suchdifferent distributions at different pixel-distribution “granularities”.

Each prepared “precursor” pixel, which is an active-matrix pixel as thatlanguage is employed herein, includes, as was mentioned, at least one,electronically, digitally-addressable assay sensor which is designed topossess, or host, at least one functionalized, electronicallydigitally-addressable fluid-assay site that will have and display anaffinity for a selected, specific fluid-assay material. Each such pixelalso includes, as earlier indicated, an “on-board”,digitally-addressable, assay-site-bathing (also referred to as“pixel-bathing”), preferably thin-film, electromagnetic-field-creatingstructure which, among other things, is controllably energizable, aswill be explained, (a) to assist in the functionalization of such a sitefor the performance of a specific kind of fluid-material assay, and (b)to assist (where appropriate) in the later output reading of the resultof a particular assay. This pixel-bathing, electronic, field-creatingstructure is capable, via the inclusion therein (by way of practice ofthe present invention) of suitable, different, field-creatingsubcomponents, and in accordance with aspects of the present invention,of producing, as a pixel-bathing, ambient field environment within itsrespective, associated pixel, any one or more of (a) an ambient lightfield, (b) an ambient heat field, and (c) an ambient non-uniformelectrical field.

In the proposed row-and-column arrangement of assay pixels prepared inaccordance with the practice of the present invention, each pixelincludes a least one, and may include more than one, assay sensor(s),with each such assay sensor being ultimately functionalized to host, orpossess, at least one, but selectively plural, assay-material-specificassay sites that are functionalized appropriately for such materials.

Additionally, and with respect to the issue of ultimate versatility asit relates to the concept regarding submatrices, it is possible tocreate (i.e., to functionalize) plural, different, internally unified(all internally alike) subareas (i.e., unified lower-pixel-countsubmatrices defined by next-adjacent, side-by-side pixels) within anoverall, entire matrix, and to functionalize such pixels to respond toone specific type of fluid-assay material, with each such different,internally unified area being functionalized to respond to respective,different assay materials.

It should be understood, regarding functionalization, that while theend-result structure created by practice of the present invention isbuilt in such a fashion that all addressable, pixel-bathingfield-creating subcomponents within each pixel are remotely digitallyaddressable to assist in pixel functionalization, actual overallfunctionalization of an assay site on a pixel assay sensor may involve,additionally, and as was mentioned briefly earlier, the utilization ofconventional flow-cell processes in order to implement a full correctfunctionalization procedure. For example, where an assay site in such apixel is to become functionalized to respond in a DNA-type assay,conventional flow-cell technology may be used, in cooperation withfunctionalization assistance provided by the on-board field-creatingstructure, to carry out such full assay-site functionalization.

As will become apparent, one especially interesting feature of a matrixmicro-structure produced by practice of this invention is that itintroduces the possibility of deriving assay-result data, includingkinetic assay-reaction data, effectively on or along plural, specialaxes not enabled by prior art devices. For example, and with respect tothe performance, or performances, of a selected, particular type offluid-material assay, pixels in a group of pixels contained in a fullmatrix, or in a lower-pixel-count submatrix, may be functionalizedutilizing plural different levels, or intensities, offunctionalization-assist fields, such as intensity-differentiated heatand/or non-uniform electrical fields. Such differentiatedfield-intensity functionalization can yield assay-result outputinformation regarding how an assay's results are affected by“field-differentiated” pixel functionalization. Similarly, assay resultsmay be observed by reading pixel output responses successively underdifferent, pixel-bathing ambient electromagnetic field conditions thatare then presented seriatim to information-outputting pixels.

Further in relation to the versatile matrix utility enabled in afinished matrix array ultimately by practice of methodology of thepresent invention, following the performance of an assay with thatarray, and with respect specifically to the reading-out ofcompleted-assay response information, time-axis output data may easilybe gathered on a pixel-by-pixel basis via pixel-specific, digital outputsampling.

Regarding the making of a matrix micro-structure as proposed by thepresent invention, an important point to note, as suggested earlierherein, is that the particular details of the processes, procedures andspecific methodologic steps which are employed specifically to fabricatethe subject micro-structure may be drawn entirely from conventionalmicro-array fabrication practices, such as the earlier-mentioned TFT,Si, low-temperature, and low-cost-substrate technology practices, wellknown to those generally skilled the art. Accordingly, while thehigh-level, overall organization of cooperative steps proposed by theinvention is unique, the details of these steps, which form no part ofthe present invention, are not set forth herein. Those generally skilledin the relevant art will understand, from a reading of the presentspecification text, taken along with the accompanying drawing figures,exactly how to practice the present invention, i.e., will be fullyenabled by the disclosure material in this text and the accompanyingdrawings to practice the invention in all of its unique facets.

The various features and advantages of the methodology of the presentinvention, including those generally set forth above, will become morefully apparent as the description of the invention which now followsbelow in detail is read in conjunction with the accompanying drawings.

DESCRIPTION OF THE DRAWINGS

FIG. 1 is a simplified, fragmentary, block/schematic view of a portionof a digitally-addressable, pixelated, fluid-assay, active-matrixmicro-structure formed in accordance with a preferred and best modemanner of practicing the methodology of the present invention.

FIG. 2 is similar to FIG. 1, except that it provides a slightly moredetailed view of the micro-structure shown in FIG. 1.

FIG. 3, which is prepared on a somewhat larger scale than those scalesemployed in FIGS. 1 and 2, illustrates, schematically, different,single-matrix organizational ways in which fluid-assay pixels in thematrix micro-structure prepared by practice of this invention may beorganized into different functionalized arrangements for differentfluid-assays that are ultimately to be performed.

FIG. 4 is a fragmentary, block/schematic diagram illustrating one formof an electromagnetic, pixel-bathing field-creating structure preparedin accordance with practice of the present invention, and specificallysuch a structure which is intended to create an ambient electromagneticfield environment characterized by light.

FIG. 5 is similar to FIG. 4, except that it illustrates anotherpixel-bathing, field-of-light-environment-creating structure.

FIG. 6 provides a fragmentary, schematic illustration of one form of apixel-bathing, heat-field-creating structure.

FIG. 7 illustrates fragmentarily another form of a pixel-bathing,heat-field-creating structure which has been prepared on the body of amechanical cantilever beam which also carries an electrical signalingstructure that responds to beam deflection to produce a relatedelectrical output signal.

FIG. 8 is an isometric view of a pixel-bathing,non-uniform-electrical-field-creating structure prepared through arecently developed process, touched upon later in this specification,involving internal crystalline-structure processing of substratematerial.

FIG. 9 provides a simplified side elevation of the structure presentedin FIG. 8, schematically picturing, also, a pixel-bathing, non-uniformelectrical field.

FIGS. 10A, 10B and 10C illustrate, in greatly simplified forms, threedifferent kinds of three-dimensional spike features which may be createdin the practice of the present invention in relation to what is showngenerally in FIGS. 8 and 9 for the production of a non-uniformelectrical field.

FIG. 11 provides a fragmentary view, somewhat like that presented inFIG. 1, but here showing a pixel which has been created in accordancewith practice of the present invention to include two (plural) assaysensors, each of which is designed to receive and host a single,potential fluid-material assay site.

FIG. 12 is somewhat similar to FIG. 11, except that this figure shows apixel which has been prepared in accordance with practice of the presentinvention to include a single fluid-assay sensor which possesses, orhosts, two (plural) potential fluid-material assay sites.

FIGS. 13-20, inclusive, provide block/schematic diagrams illustratingthe various methodological steps which characterize the preferred andbest mode manner of practicing the present invention.

DETAILED DESCRIPTION OF THE INVENTION

Turning attention now to the drawings with a view toward understanding,first of all, the nature of the end-result product which results fromimplementation of the preferred and best mode manner of practicing themethodology of the present invention, and beginning with FIGS. 1 and 2,indicated generally at 20 is a fragmentary portion of adigitally-addressable, pixelated, fluid-assay, active-matrixmicro-structure. Micro-structure 20 takes the form herein of acolumn-and-row array 22 of plural, individually externally addressablepixels, such as those shown at 24, 26, 28, 30, 32, formed, as willshortly be described, on an appropriate supporting,conventional-material, preferably glass or plastic, substrate 34. Forthe purpose of illustration herein, substrate 34 will be considered tobe a glass substrate.

As was mentioned earlier herein, the detailed and specific, asdistinguished from the high-level, low-cost and low-temperaturemethodologies and practices which are, or may be, utilized to create theoverall structure illustrated in FIGS. 1 and 2 are entirely conventionalin nature, are well understood by those generally skilled in therelevant art, and thus may easily be practiced in well-known manners toproduce the various structural aspects of micro-structure 20. Forexample, conventional Si-based, thin-film TFT patterning practices, suchas well-known photolithographic practices, may be employed in ways thatare familiar to those generally skilled in the art. Additionally, andfor certain structures present in micro-structure 20, an internalcrystalline-structure processing approach may be employed to createcertain desired mechanical characteristics, such as the bendingcharacteristics of a cantilever beam like that pictured in FIG. 7, orthe configurations of a collection of material spikes, like thatcollection which appears in FIGS. 8-10C, inclusive. Such internalcrystalline-structure processing methodology is fully described in U.S.Pat. No. 7,125,451 B2, and accordingly, the disclosure content of thatpatent is hereby incorporated herein by reference in order to providebackground information respecting such processing methodology.

In the practice of the present invention, various non-criticaldimensions may be chosen, for example, to define the overall lateralsize of a micro-structure, such as micro-structure 20. Also, the numberof pixels organized into the relevant, overall row-and-column matrix mayreadily be chosen by one practicing the present invention. As anillustration, a micro-structure, such as micro-structure 20, might havelateral dimensions lying in a range of about 0.4×0.4-inches to about2×2-inches, and might include an equal row-and-column array of pixelsincluding a total pixel count lying in a range of about 100 to about10,000. These size and pixel-count considerations are freely choosableby a practicer of the present invention.

Continuing with a description of what is shown in FIGS. 1 and 2, abracket 36 and a double-headed, broad arrow 38 (see FIG. 1) represent anappropriate communication/addressing connection, or path, between pixelsin micro-structure 20 and a suitable digital computer, such as thecomputer shown in block form in FIG. 1 at 40. Such a path exists and isemployed under circumstances where a micro-structure, such asmicro-structure 20, is being (a) functionalized, or (b) “read” after theperformance of a fluid-material assay. This inclusion of computer 40 inFIG. 1 has been done to help illustrate and describe the completedmicro-structure utility of the present invention.

Regarding the illustrated operative presence of a digital computer, suchas computer 40, it should be understood that such a computer, while“remote and external” with respect to the internal structures of thepixels, per se, might actually be formed directly on-board substrate 34,or might be external to this substrate. In this context, it should beclearly understood that computer presence, location and/or formation arenot any part of the present invention.

In the particular preferred and best mode embodiment of micro-structure20 which is illustrated in FIGS. 1 and 2, which embodiment is fabricatedin accordance with preferred and best mode practice of the presentinvention, each of the mentioned pixels is essentially identical to eachother pixel, although, as will later be explained herein, this is not anecessary requirement of the present invention. This “not-necessary”statement regarding the characteristics of the present invention isbased upon a clear understanding that there are various end-resultfluid-assay applications with respect to which appropriatelydifferentiated pixels might be fabricated in a single micro-structurearray. Some of these differentiated-pixel concepts, and theirfabrications, will be discussed and become more fully apparent laterherein.

In general terms, and using pixel 24 as an illustration to explain thebasic construction of each of the pixels shown in array 22, included inpixel 24 are several, fully integrated, pixel-specific components, orsubstructures. These include, as part of more broadly inclusivepixel-specific, digitally-addressable electronic structure, (1)thin-film, digitally-addressable electronic switching structure, (2) anon-functionalized, individually remotely digitally-addressable andaccessible assay sensor 24 a which hosts a functionalized assay site 24a ₁, and (3) what is referred to herein as a pixel-bathing, ambientenvironmental, thin-film, electromagnetic-field-creating structure 24 b.Field-creating structure 24 b, which is also remotely, or externally,individually digitally-addressable and accessible, is constructed tocreate, when energized, any one or more of three different kinds ofassay-site-bathing (pixel-bathing), ambient, environmentalelectromagnetic fields in the vicinity of sensor 24 a, including a lightfield, a heat field, and a non-uniform electrical field. While structure24 b, as was just mentioned, may be constructed to create one or more ofthese three different kinds of fields, in the micro-structure picturedin FIGS. 1 and 2, field-creating structure 24 b has been designed withthree field-creating subcomponents 24 b ₁, 24 b ₂ and 24 b ₃. Any one ormore of these subcomponents may be energized to create, within pixel 24,an associated pixel-bathing, ambient electromagnetic field condition.Subcomponent 24 b ₁ is capable of creating a pixel-bathing light field,subcomponent 24 b ₂ a pixel-bathing heat field, and subcomponent 24 b ₃a pixel-bathing non-uniform electrical field. More will be said aboutthese three different kinds of pixel-bathing, field-creatingsubcomponents shortly.

The use of a bathing electromagnetic field of an appropriate selectedcharacter during pixel functionalization, understood by those skilled inthe art, and typically used with a functionalizing flow-cell processunder way, operates to create, within a pixel and adjacent an assaysite, an ambient environmental condition wherein relevant chemical,biochemical, etc. reactions regarding functionalization flow materialcan take place, at least at the prepared, sensor-possessed assay site,or sites, to ensure proper functionalization at that site. A “preparedassay site” might typically, i.e., conventionally, be defined by asensor borne area of plated gold.

Given the active-matrix nature of end-result micro-structure 20,prepared as a consequence of practice of the present invention, itshould be understood at this point that each included pixel isappropriately prepared with one or more conventional electronicswitching device(s) (part of the mentioned electronic switchingstructure) relevant to accessing and addressing its included sensor andassay site, and to energizing its field-creating structure.Illustrations of such devices are given later herein.

Looking for a moment specifically at FIG. 2, indicated generally at 42,44 are two different communication line systems which are suitablycreated, and operatively connected to the field-creating structures inthe illustrated pixels, and to the assay sensors and assay sites shownin these pixels. The upper, fragmented ends of line systems 42, 44 inFIG. 2 are embraced by a bracket marked with the two reference numerals36, 38, which bracket represents the previously mentioned “path” ofoperative connection shown to exist in FIG. 1 between micro-structure 20and computer 40. Line system 42 is utilized by such a computer toenergize pixel-bathing, field-creating subcomponents during afunctionalization procedure, and also to energize these samefield-creating subcomponents, where appropriate, during reading-out ofthe results of a performed assay. Line system 44, on a pixel-by-pixelbasis, directly couples to computer 40 output responses derived fromfunctionalized assay sites.

Having thus now described generally the arrangement and makeup of apreferred assay micro-structure fabricated in accordance with practiceof the present invention, and having done this in the context of howthat structure is illustrated in FIGS. 1 and 2, we now shift attentionto FIG. 3 in the drawings. FIG. 3 illustrates several different ways inwhich functionalized pixels may, as enabled by the methodology of theinvention, be organized and even differentiated if desired. To beginwith, the obvious, large dots, which appear throughout in arow-and-column arrangement in FIG. 3, represent the locations offull-matrix, next-adjacent pixels constructed during practice of thisinvention. One way of visualizing utilization of such a full-matrixstructure, as represented by the full array of “dots” in FIG. 3, is torecognize that every pixel thus represented by one of the mentioned dotsmay be commonly functionalized to respond to a single, specificfluid-assay material.

By way of contrast, marked regions A, B, C in FIG. 3 illustrate threeother, representative, possible pixel functionalization patterns(specifically lower-pixel-count, submatrix patterns) that areaccommodated by the utility of the present invention.

In region A, which is but a small, or partial, region, or patch, of theoverall matrix array 22 of pixels, a functionalized submatrix patternhas been created, as illustrated by solid, horizontal and verticalintersecting lines, such as lines 48, 50, respectively, including rowsand columns of next-adjacent pixels, which pixels are all commonlyfunctionalized for a particular fluid-material assay. With this kind ofan arrangement, different patches, or fragmentary areas, ofnext-adjacent pixels may be differently functionalized so that a singlematrix array can be used differently with these kinds of patchsubmatrices to perform, for example, plural, different, fluid-materialassays.

In region B, intersecting, solid, horizontal and vertical lines, such aslines 52, 54, respectively, and intersecting, dashed, horizontal andvertical lines, such as lines 56, 58, respectively, illustrate two,different lower-pixel-count, submatrix functionalization patterns whichfit each into the category mentioned earlier herein as a “bi-alternate”functionalization pattern which effectively creates two,large-area-distribution submatrices within the overall matrix array 22of pixels. These two pixel submatrices are distributed across the entirearea of the overall matrix array, and are characterized by rows andcolumns of pixels which “sit” two pixel spacings away from one another.

Fig. C illustrates another lower-pixel-count, submatrixfunctionalization pattern wherein intersecting, light, solid, horizontaland vertical lines, such as lines 60, 62, respectively, intersectingdashed, horizontal and vertical lines, such as lines 64, 66,respectively, and intersecting, thickened, solid, horizontal andvertical lines, such as lines 68, 70, respectively, represent what wasreferred to herein earlier as a “tri-alternate” functionalizationarrangement distributed over the entire matrix array 22 ofpixels—effectively dividing that array into three overlappingsubmatrices.

Those skilled in the art, looking at the illustrative, suggestedfunctionalization patterns illustrated in FIG. 3, will understand howthese, and perhaps other, easily made functionalization patternsinterestingly tap the utility of the structure prepared by themethodology of the present invention.

Turning attention now to FIGS. 4 and 5, these two figures illustrate,schematically and fragmentarily, two different kinds of pixel-bathing,light-field-creating subcomponents creatable in the practice of theinvention. These illustrated subcomponents, with respect to what hasbeen shown and discussed earlier herein regarding FIGS. 1 and 2, mightsit at the field-creating subcomponent location which is labeled 24 b ₁in FIGS. 1 and 2. FIGS. 4 and 5, in relation to the appearances ofthings in FIGS. 1 and 2, have been drawn somewhat differently forillustration purposes.

Thus, shown specifically in FIG. 4 is a fabricated, energizable, opticalmedium 72 which is energized/switched directly by the operation of athin-film control transistor (an electronic switching device) shown inblock form at 74. This control transistor has an operative connection topreviously mentioned line system 42. A sinuous arrow 76 extends frommedium 72 toward prospective assay site 24 a ₁ which is hosted on sensor24 a. Arrow 76 schematically pictures the creation of a pixel-bathing,field of light in the vicinity of site 24 a ₁.

In FIG. 5, an appropriately constructed optical beam device 78, having alight output port 78 a, is switched on and off by means of an opticalswitching device 80 (an electronic switching device) which is fed lightthrough an appropriately formed optical beam structure 82 which in turnis coupled to an off-pixel source of light. Switching of opticalswitching device 80 is performed by a computer, such as previouslymentioned computer 40, and via previously mentioned line system 42. Asinuous arrow 84 represents a path of light flow to create apixel-bathing field of light in the vicinity of prospective assay site24 a ₁.

In each of the possible optical field-creating structures shown in FIGS.5 and 6, there are different specific arrangements of optical media,well-known to those skilled in the art, which may be built duringpractice of the invention and employed herein. For example, one suchmedium might have a horizontal-style configuration, and anotherarrangement might be characterized by a vertical-style arrangement. Sucharrangements are well-known and understood by those skilled in therelevant art.

Directing attention now to FIGS. 6 and 7, here there are illustrated,schematically, two different, electronically switchable, pixel-bathing,heat-field-creating subcomponents, one of which, namely that one whichis pictured in FIG. 6, may be used at the location designated 24 b ₂ inFIG. 1, and the other of which, namely that one which is shown in FIG.7, may be used at the location of an on-sensor-24 a site 24 d which isshown only in FIG. 7. As was mentioned earlier herein, entirelyconventional and well-known, or recently introduced (seeabove-referred-to U.S. Pat. No. 7,125,451 B2 with regard to portions ofthe structure shown in FIG. 7), specific processes may be employed, inthe overall practice of this invention, to produce the switchableheat-field-creating subcomponents illustrated in these two figures.

The first-mentioned version of a heat-field-creating subcomponent isshown generally at 86 in FIG. 6. This subcomponent (86) is also labeled24 b ₂ (in FIG. 6) in order to indicate its relationship to what hasalready been discussed above regarding the illustrations provided inFIGS. 1 and 2. From a brief look at the schematic illustration presentedin FIG. 6, those generally skilled in the relevant art will easilyrecognize how to fabricate an appropriate, similar heat-field-creatingorganization. Accordingly, and because of the fact that many different,particular heat-field-creating arrangements may be employed, no specificdetails for such an arrangement are described or illustrated herein.

The heat-field-creating subcomponent version illustrated generally at 88in FIG. 7 is one which is shown as having been formed directly adjacentprospective assay site 24 a, on a portion of assay sensor 24 a, andspecifically, formed directly on the beam 90 a of a cantilever-typemicro-deflection device 90 whose basic material body has been formedspecifically utilizing the process mentioned above referred to asinternal crystalline-structure processing.

Also formed on beam 90 a is an electrical signaling structure 92 whichmay take the form of any suitable electrical device that responds tobending in beam 90 a to produce a related electrical output signal whichmay be coupled from the relevant pixel ultimately to an externalcomputer, such as computer 40.

Directing attention now to FIGS. 8-10C, inclusive, these figuresillustrate various aspects of an electronically switchable,pixel-bathing, non-uniform-electrical-field-creating structure 94 whichmay be created within a pixel, such as within pixel 24 at the site shownat 24 b ₃ in FIGS. 1 and 2. The mechanical spike structures seen inthese figures have been fabricated employing thecrystalline-structure-processing methodology described in theabove-referred-to '451 B2 U.S. patent.

As can be seen in FIGS. 8 and 9, the structure suggested herein for thecreation of a non-uniform electrical field takes the form of a sub-arrayof very slender, approximately equal-height micro-spikes, such as thoseshown at 94 a in FIG. 9, with regard to which electrical energization,as by a computer, such as computer 40, results in the production of anappropriate pixel-bathing, non-uniform electrical field, shown generallyand very schematically in a cloud-like fashion at 96 in FIG. 9.

FIGS. 10A, 10B and 10C illustrate several, different, representativemicro-spike configurations and arrangements which might be used tocharacterize a non-uniform electrical field-creating subcomponent. Suchmicro-spikes are simply illustrative of one of various kinds ofdifferent, electronically switchable structures which may be createdwithin a field-creating structure in a pixel to develop, when energized,a suitable, non-uniform electrical field.

FIG. 10A illustrates modified micro-spike structures 94 a regardingwhich distributed micro-spikes may have, either uniformly, ordifferentially, different heights lying within a user-selectable heightrange generally indicated at H.

FIG. 10B illustrates an arrangement wherein micro-spikes 94 a areconfigured like those shown in FIGS. 8 and 9, except for the fact thatthese FIG. 10B micro-spikes are more densely organized, as indicated bynext-adjacent, interspike distance D. Such an interspike distance isfreely chooseable by a user, and need not be uniform throughout a fullsub-array of micro-spikes.

What is illustrated in FIG. 10C is an arrangement wherein the picturedmicro-spikes 94 a may have several differentiating characteristics, suchas differentiating heights and sharpnesses (i.e., pointednesses).

Those skilled in the art will understand that the specific configurationof a non-uniform-electrical-field-creating subcomponent utilizingspikes, such as those just discussed, may be created in any one of anumber of different ways.

Addressing attention now to FIGS. 11 and 12, what is shown in FIG. 11 isa modified fragmentary region drawn from the fragmentary illustration ofFIG. 1. This figure specifically illustrates a pixel 98, constructed asa part of practice of the present invention, and possessing two assaysensors 98 a, 98 b, each of which hosts but a single prospective assaysite 98 a ₁, 98 b ₁, respectively.

The modification illustrated in FIG. 12 shows an arrangement wherein apixel 100, also constructed as a part of practice of the presentinvention, possesses a single sensor 100 a which is structured so as tohost two, different, potential assay sites 100 a ₁ and 100 a ₂.

Turning attention now to FIGS. 13-20, inclusive and respectively, theseeight figures illustrate the several, key, high-level steps (shown asblocks) which characterize the preferred and best mode manners ofpracticing the present invention to produce the micro-structure, and itsvarious unique features, set forth and discussed above. What is shown inthese figures, therefore, will be presented now in the context of thosekey, contributed, methodologic invention steps—recalling that thespecifics of these steps'individual implementations may be, andpreferably are, carried out in various conventional ways, such as theearlier mentioned, or suggested, micro-structure, photolithographic (andother) patterning and fabrication practices used widely in, for example,the making of all kinds of thin-film, micro-device (e.g.,transistor-device) structures.

Additionally, and as will be seen, the variousdrawing-figure-illustrated steps of the invention pictured in thesefigures, and the associated block/schematic ways presented there for“viewing” of the relevant invention methodology (from somewhat differentvantage points, drawing figure by drawing figure), are word-labeled onlywith the appropriate single words which are the “lead” words of fullmethodologic statements. These full methodologic statements of therespectively block-diagram-represented method steps are presentedcompletely, however, in the specification text set forth immediatelyhereinbelow.

From a high-level overview of what is shown regarding the nature of thepresent invention by FIGS. 13 and 14, and as is made evident from thetext material presented hereinabove, the invention can be seen to bedescribable (FIG. 13) as being a method for PRODUCING (block 102) anactive-matrix, fluid-assay micro-structure, including the steps of (a)ESTABLISHING (block 104) an array of digitally-addressable,assay-material-specific-functionalizable pixels, and (b) employingpixel-specific digital addressing for selected array-established pixels,individually FUNCTIONALIZING (block 106) these pixels. In a moreparticular sense, the ESTABLISHING step may be expressed in the contextof utilizing low-temperature TFT and Si technology in relation toforming devices preferably on a glass or plastic substrate.

This high-level method overview can also be seen, from a slightly morespecific point of view in FIG. 14, to be one wherein the step ofFUNCTIONALIZING (block 106) a selected pixel includes individually andcontrollably BATHING (block 108) that pixel with a selected-characterelectromagnetic field.

Looking now more particularly at what appears in FIGS. 15-18, inclusive,FIG. 15, which includes blocks, or steps, 102 (PRODUCING), 104(ESTABLISHING) and 110 (PREPARING), 112 (CONNECTING), 114 (ADDRESSING),and 116 (EFFECTING) provides another kind of overview, even somewhatmore specific than what was just stated immediately above, of themethodology of the present invention. In this setting, blocks 110, 112,114, 116 are shown to be functionally included within block 102, andinterconnected therein by sequence-indicating arrows 118, 120, 122, 124.

Thus, in accordance with what is specifically shown in FIG. 15, and withappropriate reference made back to the structural discussion providedearlier herein, the invention, as here illustrated, can be expressedverbally as a method for PRODUCING (block 102) a remotelydigitally-addressable, pixelated, active-matrix, fluid-assaymicro-structure, including the steps of (a) ESTABLISHING (block 104), ona supporting substrate, an array of plural pixels, (b) PREPARING (block110) each established pixel with digitally-addressable electronicstructure designed to effect, for and with respect to that pixel, andunder the control of an appropriately operatively connected digitalcomputer, at least one of (1) selective, independent,fluid-assay-material-specific functionalization, and (2) assay-resultoutput reading, (c) operatively CONNECTING (block 112) such a computerto the electronic structure which is associated with at least one of theestablished and prepared pixels, (d) employing the operatively connectedcomputer, digitally ADDRESSING (block 114) the electronic structure inthe at least one associated pixel, and (e) by that ADDRESSING (block114) step, EFFECTING (block 116) at least one of (1) selectedfluid-assay-material-specific functionalizing, and (2) assay-resultoutput reading of at least one pixel.

FIG. 16 further pictures the step of PREPARING (block 110). Morespecifically, this PREPARING step (block 110) is shown to include thecompanion, but not necessarily sequential, 126 (PROVIDING) and 128(FORMING) steps. In the language of words, FIG. 16 therefore effectivelydescribes the invention as taking the form of what is expressed in andby FIG. 15, wherein further, the PREPARING step (block 110) includes (a)PROVIDING (block 126) each pixel with at least one electronically,digitally-addressable assay sensor operatively connected to alsoprovided electronically digitally-addressable electronic switchingstructure, and constructed to host at least one electronically,digitally-addressable, ultimately functionalizable assay site, and (b)FORMING (block 128) within each pixel an electronically,digitally-addressable electromagnetic field-creating structure alsooperatively connected to the also provided electronic switchingstructure, and which is selectively energizable by the mentionedcomputer to participate in at least one of (1) pixel functionalization,and (2) assay-result output reading with regard to a functionalizedpixel.

FIG. 17 relates to FIG. 16 in somewhat, though not completely, the samemanner that FIG. 16 relates to FIG. 15, in the sense that FIG. 17further characterizes the methodology of the invention expressed in FIG.16 by describing something more about the included functional content ofone of the blocks/steps pictured in FIG. 16. In particular, FIG. 17further characterizes the invention by elaborating the functionalcontent of the step of PROVIDING, (block 126)—indicating that thePROVIDING (block 126) step includes, as will be more fully set forthbelow, the step of FABRICATING (block 130), and additionally includesthe further step of PRODUCING (block 132). A connecting line 134indicates the just-mentioned “further step” relationship between blocks130, 132.

In narrative form, FIG. 17 illustrates that, with respect to theinvention as pictured in FIG. 16, the PROVIDING (block 126) of eachpixel with the mentioned at least one electronicallydigitally-addressable assay sensor includes FABRICATING (block 130) thatsensor within the pixel as a micro-deflection device. FIG. 17 alsoillustrates that the step of PROVIDING (block 126) further includes thestep of PRODUCING (block 132), on the fabricated micro-deflectiondevice, a remotely, electronically, digitally-addressable electricalsignaling structure which is operable to generate an electrical signalrelated to deflection of the micro-deflection device.

FIG. 18, in pictured blocks/steps 130, 136 illustrates that the step ofFABRICATING (block 130) the mentioned micro-deflection device takes theform of CREATING (block 136) a cantilever structure.

FIG. 19 employs blocks/steps 128 (FORMING) and 138 (CONSTRUCTING), alongwith “produced-structure” blocks 140, 142, 144 (still to be described),to elaborate, somewhat, the functional content of the step of FORMING(block 128) within each pixel an electronically, digitally-addressableelectromagnetic field-creating structure. In particular, FIG. 19describes the functional condition that the step of FORMING (block 128)a field-creating structure includes CONSTRUCTING (block 138), withineach pixel, at least one of (a) a light-field-creating (L) subcomponent(block 140), (b) a heat-field-creating (H) subcomponent (block 142), and(c) a non-uniform-electrical-field-creating (E) subcomponent (block144).

Finally, FIG. 20 further characterizes the CONSTRUCTING (L) step (blocks138, 140) of the invention by pointing out that it can take twodifferent forms of a step referred to as MAKING (block 146). Morespecifically, the step of CONSTRUCTING (L) (blocks 138, 140) of alight-field-creating subcomponent involves the MAKING (block 146) eitherof a pixel on-board light (POB) source (block 148), or of apixel-communicative, on-substrate, optical beam structure (OBS) (block150), adapted for optical coupling to an off-pixel light source.

Thus, a unique, high-level methodologic practice for producing alikewise unique, digitally-addressable, pixelated, functionalized,active-matrix, fluid-assay micro-structure, useable ultimately in afluid-material assay, has been illustrated and described. The inventionmethodology produces such a micro-structure wherein each pixel isindividually and independently digitally-addressable andfunctionalizable to display an affinity for at least one specificfluid-assay material, and following such functionalization, and thesubsequent performance of a relevant assay, individually andindependently digitally readable to assess assay results.Pixel-specific, digitally-addressable, electromagnetic field-creatingstructures enable widely-varied, controlled pixel functionalizationunder different kinds of ambient field conditions, and also enable,ultimately, a rich range (time-sampling-based, and on additional,uniquely permitted information axes, such as field-intensity varyingaxes) of assay-result output reading possibilities, some of which havebeen specifically mentioned above.

The matrix structure made by practice of the methodology of theinvention utilizes, preferably, a low-cost substrate material, such asglass or plastic, and features, also preferably, the low-temperaturefabrication on such a substrate of supported pixel structures, includingcertain kinds of special internal components or substructures, allformed preferably by TFT and Si technology as discussed above. Thus onecan think about this invention as involving, preferably, silicon onglass or plastic technology.

Accordingly, while a preferred and best mode manner of practicing themethodology of the invention have been described and suggested herein,and certain variations and modifications thereof discussed, it isunderstood that additional variations and modifications may also be madewhich will come within proper spirit and scope of the invention.

1. A method for producing on a supporting substrate an active-matrix,fluid-assay micro-structure comprising establishing an array ofdigitally-addressable, assay-material-specific,internally-functionalizable pixels, and employing pixel-specific digitaladdressing for selected, array-established pixels, individuallyfunctionalizing these pixels.
 2. The method of claim 1, wherein saidfunctionalizing of a selected pixel includes individually andcontrollably bathing that pixel with a selected-characterelectromagnetic field.
 3. A method for producing a remotelydigitally-addressable, pixelated, active-matrix, fluid-assaymicro-structure comprising establishing, on a supporting substrate, anarray of plural pixels, preparing each established pixel with included,digitally-addressable electronic structure designed to effect, for andwith respect to that pixel, and under the control of an appropriatelyoperatively connected digital computer, at least one of (a) selective,independent, fluid-assay-material-specific functionalization, and (b)assay-result output reading, operatively connecting such a computer tothe electronic structure which is associated with at least one of theestablished and prepared pixels, employing the operatively connectedcomputer, digitally addressing the electronic structure in the at leastone associated pixel, and by said addressing, effecting at least one of(a) selected fluid-assay-material-specific functionalizing, and (b)assay-result output reading of at least one pixel.
 4. The method ofclaim 3, wherein said preparing includes providing each pixel with anelectronically, digitally-addressable assay sensor, and which furthercomprises forming within each pixel an electronically,digitally-addressable electromagnetic field-creating structure.
 5. Themethod of claim 4, wherein said forming of a field-creating structureincludes constructing, within each pixel, at least one of (a) alight-field-creating subcomponent, (b) a heat-field-creatingsubcomponent, and (c) a non-uniform-electrical-field-creatingsubcomponent.
 6. The method of claim 5, wherein said constructing, if ofa light-field-creating subcomponent, includes making a pixel on-boardlight source.
 7. The method of claim 5, wherein said constructing, if ofa light-field-creating subcomponent, includes making apixel-communicative, on-substrate, optical beam structure adapted foroptical coupling to an off-pixel light source.
 8. The method of claim 4,wherein said providing of each pixel with the mentioned at least oneassay sensor includes fabricating that sensor within the pixel as amicro-deflection device.
 9. The method of claim 8, wherein saidproviding further includes producing, on the fabricated micro-deflectiondevice, a remotely, electronically, digitally-addressable electricalsignaling structure which is operable to generate an electrical signalrelated to deflection of the micro-deflection device.
 10. The method ofclaim 8, wherein said fabricating of the mentioned micro-deflectiondevice takes the form of creating a cantilever structure.
 11. A methodfor producing on a supporting substrate an active-matrix, fluid-assaymicro-structure comprising utilizing low-temperature TFT and Sitechnology, establishing an array of digitally-addressable,assay-material-specific-functionalizable pixels, and employingpixel-specific digital addressing for selected, array-establishedpixels, individually functionalizing these pixels.
 12. The method ofclaim 11, wherein said functionalizing of a selected pixel includesindividually and controllably bathing that pixel with aselected-character electromagnetic field.
 13. A method for producing aremotely digitally-addressable, pixelated, active-matrix, fluid-assaymicro-structure comprising utilizing low-temperature TFT and Sitechnology, establishing, on a glass or plastic supporting substrate, anarray of plural pixels, preparing each established pixel withdigitally-addressable electronic structure designed to effect, for andwith respect to that pixel, and under the control of an appropriatelyoperatively connected digital computer, at least one of (a) selective,independent, fluid-assay-material-specific functionalization, and (b)assay-result output reading, operatively connecting such a computer tothe electronic structure which is associated with at least one of theestablished and prepared pixels, employing the operatively connectedcomputer, digitally addressing the electronic structure in the at leastone associated pixel, and by said addressing, effecting at least one of(a) selected fluid-assay-material-specific functionalizing, and (b)assay-result output reading of at least one pixel.
 14. The method ofclaim 13, wherein said preparing includes providing each pixel with anelectronically, digitally-addressable assay sensor, and which furthercomprises forming within each pixel an electronically,digitally-addressable electromagnetic field-creating structure.
 15. Themethod of claim 14, wherein said forming of a field-creating structureincludes constructing, within each pixel, at least one of (a) alight-field-creating subcomponent, (b) a heat-field-creatingsubcomponent, and (c) a non-uniform-electrical-field-creatingsubcomponent.
 16. The method of claim 15, wherein said constructing, ifof a light-field-creating subcomponent, includes making a pixel on-boardlight source.
 17. The method of claim 15, wherein said constructing, ifof a light-field-creating subcomponent, includes making apixel-communicative, on-substrate, optical beam structure adapted foroptical coupling to an off-pixel light source.
 18. The method of claim14, wherein said providing of each pixel with the mentioned at least oneassay sensor includes fabricating that sensor within the pixel as amicro-deflection device.
 19. The method of claim 18, wherein saidproviding further includes producing, on the fabricated micro-deflectiondevice, a remotely, electronically, digitally-addressable electricalsignaling structure which is operable to generate an electrical signalrelated to deflection of the micro-deflection device.
 20. The method ofclaim 18, wherein said fabricating of the mentioned micro-deflectiondevice takes the form of creating a cantilever structure.
 21. A methodof making a fluid-material assay structure comprising providing alow-temperature substrate having a surface, and forming a matrixdistribution of assay pixels on said surface, with each pixel includingthin-film, digitally addressable electronic switching structureactivatable to play an operative role in pixel functionalization, andrespecting each pixel, digitally activating the associated switchingstructure in a process involving functionalizing of the pixel.